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DVSL-501E VACUUM PUMP HIGH PRESSURE

ANEST IWATA AIR ENGINEERING, INC

ITEM#: 2091-DVSL501E

MFR#: DVSL-501E

KF-25 Inlet, 18.4 CFM, Three Phase Motor. Applications: Sputtering equipment, Vacuum deposition equipment, Ion plating equipment. Accelerator, Synchrotron Radiation. Surface modification, Electron beam process. Gas recovery devices. Vacuum equipment.

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DVSL-501E VACUUM PUMP HIGH PRESSURE
{2091-DVSL501E}

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Product Name	Description	Item#	QTY
DVSL-501E VACUUM PUMP HARD COAT	DVSL-501E HARD COATED SCROLL VACUUM PUMP (OIL FREE) HIGH PRESSURE	2091-DVSL501EHC	EA
DVSL-501E MODULE ONLY	KF-25 Inlet, 18.4 CFM, Three Phase Motor. Applications: Sputtering equipment, Vacuum deposition equipment, Ion plating equipment. Accelerator, Synchrotron Radiation. Surface modification, Electron beam process. Gas recovery devices. Vacuum equipment.	2091-DVS501E	EA
DVSL-500E VACUUM PUMP (OIL FREE)	KF-25 Inlet, 18.4 CFM, Three Phase Motor. Applications: Sputtering equipment, Vacuum deposition equipment, Ion plating equipment. Accelerator, Synchrotron Radiation. Surface modification, Electron beam process. Gas recovery devices. Vacuum equipment.	2091-DVSL500E	EA
DVSL-100C/B VACUUM PUMP OIL FREE	KF-25 Inlet, 4.2 CFM, Single Phase. Applications: Sputtering equipment, Vacuum deposition equipment, Ion plating equipment. Accelerator, Synchrotron Radiation. Surface modification, Electron beam process. Gas recovery devices. Vacuum equipment. Leak	2091-DVSL100CB	EA
MINOR MAINTENANCE for DVSL-500	(8000, 24000 hours) Replacement parts include: Tip Seals, O-Rings, Air Flush Kit, Spider. Cleaning inspect all parts, Re-greasing bearing (OS, OS pin-crank)	2091-SMDV500	EA