ITEM#: 3042-Z5617031EA
MFR#: Z561703-1EA
Use with the Expanded or Basic Plasma Cleaner for fine control of up to 2 process gases, process gas mixing, and monitoring of chamber pressure.. Dual gas inputs. Flowmeter 1: 49 mL/min maximum flowrate *. Flowmeter 2: 104 mL/min maximum flowrate *.